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Angstrom Sciences Angstrom Sciences, Inc. - www.angstromsciences.com
- 40 South Linden Street, Duquesne, PA 15110, USA

email: info@angstromsciences.com, Tel. +1 412-469-8466

Angstrom Sciences' European office provides consultative services, sales advice, and technical support on the company's high performance magnetron sputter sources for a wide variety of thin film sputter applications. Angstrom Sciences is headquartered out of it 18,000 sq-ft manufacturing facility in Pennsylvania, USA.
products: magnetron sputter sources
  • Circular Magnetrons: 1"-16" diameters
  • Linear Magnetrons: 1"-16" widths, up to 13ft in length
  • Rotary Magnetrons: 4", 6", 6.75", 8", 9.25", 10", 12", 16" diameters
  • Cylindrical Magnetrons: 3"-6" diameters
  • Custom Magnetrons and Cluster Assemblies
  • Magnet Retrofits for BOC, MRC, CVC, Leybold, Perkin Elmer, and Cylindrical Assemblies and other manufacturers' designs
Patented advancements in magnet technology and cathode design provide high target utilization and deposition rates without compromising process film uniformity. Cathode styles include direct cooled, indirect cooled, high power pulsed, high power rf, high temperature, and ultra high vacuum designs. Magnetics are optimized for high rate, high utilization, high uniformity, high magnetic, balanced, or unbalanced applications. The structural integrity of Angstrom Sciences stainless steel and OFHC copper design creates a sputter tool that stands up to the most rigorous industrial applications. All magnetrons are backed by a 2-year warranty.






AJA International Sputtering Systems AJA INTERNATIONAL, Inc.
- 809 Country Way, North Scituate, MA 02066, USA

email, Tel.

It has always been the primary philosophy at AJA International to expand conservatively, manufacturing and representing products of exceptional value, while relying on customer satisfaction and technical excellence as our primary promotional vehicles. The company chooses its projects carefully in order to maintain its reputation and attends many technical conferences / exhibitions worldwide to stay abreast of the latest in thin film, semiconductor and microwave technology.
products:

Sputtering Systems, R&D Sputter Sources, Production Sputter Sources, Power Supplies, Targets


Dexter Z-Gun Magnetron Sputter Source Dexter Magnetic Technologies Inc.
- 46665 Fremont Blvd., Fremont, CA 94538, USA

email, Tel.

Our company first started as Permag Corp., formed in New York in 1951, with the concept of selling small volume standard and customized permanent magnets. The concept was very successful, and Permag grew to nine full service facilities located throughout the U.S. serving local and regional customers.
In 1985 Permag was sold to Dexter Corporation. In July of 2000, Dexter Magnetic Technologies was sold to Loctite Corporation as part of a larger transaction.
In July of 2001, Dexter Magnetic Technologies emerged as a privately held company through a financially assisted management buyout. Our backers include leading equity and financial partners that have supported our investment in critical projects to provide greater value to customers.
In August of 2004, to better support the emerging market in Aisa, the company opened a representative office in Nanjing, China.
products: Z-Gun™ Magnetron Sputter Source

Our newly developed Rotating Magnetron Guns (Z-Guns™) have been specifically engineered for the demanding requirements of data storage media producers. Integration with a new system or retrofitting an existing system is facilitated by Dexter's new design and control interface.


Direct Vacuum Sputtering Gun Micro Magnetics, Inc.
- 421 Currant Road, Fall River, MA 02720, USA

email, Tel.

DirectVacuum, a division of Micro Magnetics, Inc., services the industrial, government, life science, education, electronics and pharmaceutical markets as a manufacturer and distributor of scientific equipment, supplies, materials and furniture.
products: Sputtering Gun


Materials Science Materials Science, Inc.
- 1662 Los Altos Road, San Diego, CA 92109, USA

email, Tel.

Materials Science, Inc. was established in 1989 and incorporated in 1992. The company specializes in magnetron sputter deposition. We manufacture and distribute products from multiple locations throughout the United States. We are adept at translating this technology into products that enable our customers to improve product quality and lifetime, increase manufacturing productivity, produce films and structures with qualities previously difficult to obtain and which increase profitability.
products: SunSource Round Magnetron Sputtering Sources
  • Wide Uniform Erosion Area results in stable operation, minimal distribution & uniformity/rate changes throughout the target lifetime.
  • Active Plasma Discharge on nearly entire target surface keeps target clean & reduces insulating film growth that leads to arcing.
  • Argon Gas Through Cathode Body - Additional Feedthroughs, external manifolds & other plasma disturbing hardware that increases required periodic maintenance frequency is unnecessary.
  • Available in 4in to 8in Diameter Targets
  • Internal and Flange Mount Configurations
  • Can be Used in DC, Pulsed DC, AC, RF & HIPIMS Modes
  • 35-40 Wt% Target Utilization
  • Low 10-4 Torr Operation
  • Fully Stoichiometeric Dielectric Materials at Low Pressures & Temperatures
  • 20% Higher rates due to broad erosion area & highly efficient cooling


Sputter sources MeiVac Inc. & US Division of MeiVac
- 5830 Hellyer Avenue, San Jose, CA 95138, USA

email, Tel.

MeiVac brings more than 30 years of experience in the design, manufacture and support of vacuum deposition systems and components used in high technology, process intensive production applications. Today, MeiVac is best known for its 2460 & 2480 family of alumina deposition tools that are used extensively in the manufacture of Thin Film Heads used in Hard Disk Drives.
Additionally, MeiVac offers a Components product line, the most significant of which are throttle valves, sputter sources, sputter source power supplies and substrate heaters that are used in applications ranging from R&D to production
products: MAK Sputter sources

Designed to present the smallest profile possible, with higher rates than any comparable sputter sources available, unique planar magnetron MAK sputter guns have been used by MeiVac customers to develop many of today's most widely used thin film techniques.
  • Cathode and magnets are ISOLATED FROM WATER
  • Design requires only ONE vacuum seal
  • Supplied as either HV or UHV
  • NO water to Vacuum seal
  • Sputters MAGNETIC MATERIAL
  • Target requires NO CLAMPING or BONDING to cathode
  • Operates in DC or RF power modes
  • Sputters from 0.5 - 600 mTorr Ar
  • Adjustable anode, PREVENTS build up and shadowing


Vacuum Plasma Thin Film Processes Plasma Surface Engineering Corporation
- 1662 Los Altos Road, San Diego, CA 92109, USA

email, Tel.

Plasma Surface Engineering Corporation (PSE) specializes in vacuum plasma processing technology, particularly ion beam processing and magnetron sputter deposition. The company has an impressive intellectual property portfolio, including seminal patents for anode layer ion sources, multiple cell ion sources and combinations of ion beam-magnetron sputtering sources. We are adept at translating this technology into products that enable our customers to improve product quality and lifetime, increase manufacturing productivity, produce films and structures with qualities previously difficult to obtain and which increase profitability.
products: ion beam processing and magnetron sputter deposition
  • Spindrift™ Anode Layer Ion Beam Sources and Packages
  • SunSource™ Magnetron Sputtering Sources
  • Sputtering Packages
  • i-Mag™ Combination Ion Beam - Magnetron Sputtering Sources
  • RF Plasma Power Generation Systems and Components
  • DGi™ Integrated Inductively Coupled RF Plasma Sources
  • Delta Glow™ Inductively Coupled RF Plasma Sources


magnetron source PVD Products, Inc.
- 231 Andover Street, Wilmington, MA 01887, USA

Jim Greer,

PVD Products, Inc. has been selling a wide variety of high quality PLD systems, magnetron sputtering systems and sources, thermal and e-beam evaporators.
products: Sputtering, Sputtering systems and magnetron sources
  • complete integrated sputter systems to meet the customer's specific deposition requirements
  • a full line of Magnetron Sputter sources from 1-inch up to 6-inch in diameter
Pulsed Laser Deposition, Evaporation/IBAD Systems, Substrate Heaters, Coated Conductors, Custom Deposition Systems


Sierra Applied Sciences Sierra Applied Sciences
- 5441 Western Avenue, Boulder, CO 80301, USA

email, Tel.

Sierra Applied Sciences was founded in 1989 by our current President and C.T.O., Barry Manley. Today the company is the world leader in thin-film sputtering technology.
products: cathodes and engineering support for sputtering applications

Round cathodes, Rectangular Cathodes, Magnetic targets: the most difficult challenge for utilization in the sputtering industry , Cathodes for sputtering non-magnetic materials, Magnet and Cathode Retrofit Designs.

Sierra Applied Sciences works through simple design and innovative concepts to provide customers with reliable cathodes for a variety of systems including Photo Voltaic's for Solar, CD's, Optical Filters, Flat Panel Displays, Magnetic Media and Heads, Plastic Films, Architectural Glass and more.


SPUTTERING COMPONENTS SPUTTERING COMPONENTS - www.
- 375 Alexander Drive, MN 55021 Owatonna, USA

Bill Meredith, email, Tel.

Sputtering Components offers reliable and affordable rotary cathode technology. Over 400 SCI rotary cathode systems are in the field serving the glass coating, semi-conductor, LCD, and photovoltaic industries. SCI provides rotary cathodes and magnet assemblies for systems of any width. Our compact designs allow for the highest packing density of cathodes in your system and the greatest coverage of glass or web. Our End Blocks can be used to retrofit existing lids, or we can provide turn-key solutions using our e-Cathode™ system.
products: Rotary cathode technology

Rotary magnetron cathodes (end blocks and side mount styles), rotary seals, magnet assemblies for rotary cathodes, complete cathodes with integrated electronics.


US Gun US, Inc. Headquarters
- 6280 San Ignacio Avenue, Suite E, San Jose, CA 95119, USA

email, Tel.

US Inc., was established in 1976 and located in the heart of Silicon Valley. This location provides cooperative design, test, and thin film application for product advancements, with well known universities and national laboratories.
Since the early 1980's exclusive licenses from two prominent Silicon Valley laboratories have been granted to US Inc., permitting the manufacture and distribution of patented Planar Magnetron Sputter Sources. With over 6,000 sources delivered throughout the world, US Inc. has become known world wide as a leading supplier of sputter deposition sources.
products: sputter sources

The MAK source, US Inc.'s successor to the highly regarded US GUN, is produced at the company's San Jose, California U.S.A. facility. Introduction of the MAK was in late 1995 and it's rapid sales growth caused the discontinuation of the US GUN at the beginning of 1999. Designed to present the smallest profile possible, with higher rates than any comparable sputter sources available, MAK users have developed much of today's thin film techniques.

 

 

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