- 2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto, 601-8510, Japan
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- Micropole™ is a miniature array of quadrupole mass spectrometers which has 9 detection parts using 16 original column electrodes. This allow for easy integration into small spaces whilst still getting state of the art resolution.
- In addition, the ability to operate at higher pressures without using a differential pump, makes this suitable for gas monitoring, both during process and after chamber cleaning.