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Pfeiffer Vacuum is a vacuum technology world leader for more than 130 years: an important milestone was the invention of the turbopump in our company more than 50 years ago.
Our comprehensive range of solutions, products and services includes vacuum pumps, measurement and analysis equipment, up to complex vacuum systems.
Quadrupole mass spectrometers are the classic measuring instrument for evaluating residual gas composition in a vacuum system.
The ion currents supplied by the mass spectrometer for the mass-to-charge ratio of the gas components provide meaningful information about a vacuum system in the multiple phases of operation, whether for determining the tightness and the absence of contamination after setup or for its characterization when operating a vacuum process.
The pressure range which can be achieved in the vacuum system based on the design of the vacuum chamber and pumping system determines the selection of the mass spectrometer with respect to the detector. A Faraday detector is frequently sufficient in high vacuum, while a secondary electron multiplier is necessary in ultra-high vacuum to detect the very low gas densities.